专利摘要:
A mode size converter (102) including an overlay waveguide (106) having an input end (130) configured to receive light from an optical element (104). The overlapping waveguide (106) has a first refractive index. The mode size converter (102) also includes a signal waveguide (108) that is integrated in the overlap waveguide (106) and has a second refractive index that is greater than the first refractive index . The signal waveguide (108) includes first and second arm segments (160, 162) and a trunk segment (164) that form a Y-junction (166). The first and second arm segments (160, 162) are configured to reduce a modal profile of the light propagating toward the trunk segment (164) from the input end (130) of the lap waveguide (106). Each of the first and second arm segments (160, 162) has a distal end (182) and a pair of opposed lateral edges, the edges of the pair of side edges extending parallel to each other between the corresponding distal end (182) and the trunk segment (164).
公开号:FR3028324A1
申请号:FR1560513
申请日:2015-11-03
公开日:2016-05-13
发明作者:Ling Tao;Jonathan Lee
申请人:Tyco Electronics Corp;
IPC主号:
专利说明:

[0001] MODE SIZE CONVERTERS FOR REDUCING A MODAL LIGHT INCIDENT PROFILE BACKGROUND OF THE INVENTION [0001] The present content generally relates to mode size converters that change a modal pattern of light propagation, and to devices Optics comprising these mode size converters. [0002] Optical devices are recently used in more and more industries, and in particular optical devices developed by photonics on silicon. Such optical devices include photonic integrated circuits, ie Photonic Integrated Circuit (PIC), which can be used for various applications in the field of optical communication, instrumentation and signal processing. A PIC IC may include submicron waveguides for interconnecting various on-chip components, such as optical switches, couplers, routers, splitters, multiplexers / demultiplexers, modulators, amplifiers, and length converters. waveforms, optical-to-electric signal converters and electrical-optical signal converters. An advantage of PIC systems is their potential for large scale manufacturing and integration through known semiconductor manufacturing techniques, such as complementary metal oxide semiconductors, or Complementary Metal Oxide Semiconductor (CMOS). [0003] A PIC may be optically coupled to an external optical fiber such that the PIC receives light from the optical fiber and / or directs light into the optical fiber. However, it can be complicated to optically couple the optical fiber with the PIC reliably and efficiently. For example, the optical fiber has a much larger cross-sectional area than the cross-sectional area of the PIC submicron waveguide. As a result, the light propagating inside the optical fiber will have a much larger modal profile than the modal profile of the light in the PIC waveguides. When light makes the transition between the optical fiber and the PIC, the modal profile of the light must change in size (this process being called mode conversion) without significant losses. A known mode size converter (the point size converter) comprises a covering waveguide (or coating) and a silicon waveguide which is integrated into the overlay waveguide . The silicon waveguide has an inverted conical geometry in which an end of the silicon waveguide is positioned near an edge of the lap waveguide. As the silicon waveguide extends from the end, the width of the silicon waveguide adiabatically increases to a final cross-sectional area that is capable of supporting a propagation mode. . Light from the optical fiber enters through the edge of the overlapping waveguide and is evanescently coupled to the silicon waveguide. The light is progressively more confined as the silicon waveguide expands toward the single-mode bandwidth guide. As a result, the modal profile of light from the optical fiber is reduced to a size suitable for propagation through the silicon waveguide. Although such mode size converters can effectively reduce the modal profile, mode size converters may present certain challenges or disadvantages. The mode size converter may for example exhibit insufficient coupling efficiency, low alignment tolerance, and / or its manufacture may not be commercially viable. Accordingly, there is a need for a mode size converter that has sufficient coupling efficiency, high alignment tolerance, and / or non-prohibitive manufacturing costs. BRIEF DESCRIPTION [0007] In one embodiment, a mode size converter is provided that includes a lap waveguide having an input end configured to receive light from an optical element. The overlapping waveguide has a first refractive index. The mode size converter also includes a signal waveguide that is integrated in the overlay waveguide and has a second refractive index greater than the first refractive index. The signal waveguide includes first and second arm segments and a trunk segment that form a Y-junction. The first and second arm segments are configured to reduce a modal profile of the light propagating from the inlet end of the lap waveguide to the trunk segment. Each of the first and second arm segments has a distal end and a pair of opposed lateral edges. The edges of the pair of side edges extend parallel to each other between the corresponding distal end and the trunk segment. In some embodiments, each of the first and second arm segments may include an inclined extension and a base portion that is coupled to the corresponding inclined extension. The inclined extensions of the first and second arm segments may form a V-shaped pattern. The base portions of the first and second segments may extend substantially parallel with a usable gap between them. In some embodiments, the trunk segment may include an intermediate portion and a guide portion. The intermediate portion may couple to the first and second arm segments and have an inverted conical geometry that is reduced from a base of the intermediate portion to a coupling end of the intermediate portion. The coupling end may couple to the first and second arm segments. The base can couple with the guide portion of the trunk segment. In some embodiments, the light may be configured to propagate along a light propagation axis from the entrance end of the lap waveguide to the trunk segment. The Y junction may be symmetrical with respect to a plane that includes the light propagation axis. In some embodiments, the lap waveguide has a width and includes a conical section. The width of the lap waveguide may be reduced along the conical section as the lap waveguide extends from the input end to the signal waveguide. . The overlay waveguide may optionally include a channel section in which at least a portion of the signal waveguide is arranged. The conical section may be located between the input end and the channel section. In some embodiments, the distal ends of the first and second arm segments may be arranged in the conical section, in the channel section or at a boundary therebetween. In particular embodiments, the distal ends of the first and second arm segments are arranged at or immediately adjacent to the boundary between the channel section and the conical section. In some embodiments, the mode size converter may be formed via at least one of a silicon on insulator (SOI) type process and a complementary metal oxide semiconductor (CMOS) type process. In one embodiment, there is provided a mode size converter which includes an overlay waveguide having an input end configured to receive light from an optical element. The overlapping waveguide has a first refractive index. The mode size converter also includes a signal waveguide that is integrated in the overlay waveguide and has a second refractive index that is greater than the first refractive index. The signal waveguide includes first and second arm segments and a trunk segment that form a Y-junction. The first and second arm segments are configured to reduce a modal profile of light that propagates from the inlet end of the lap waveguide to the trunk segment. Each of the first and second arm segments includes an inclined extension and a base portion that is coupled to the inclined extension. The inclined extensions of the first and second arm segments form a V-shaped pattern. The base portions of the first and second segments extend substantially parallel with an interval usable between them. In some embodiments, each of the first and second arm segments has a distal end and a pair of opposed side edges. The edges of the pair of side edges may extend parallel to each other between the corresponding distal end and the trunk segment. In some embodiments, the trunk segment may include an intermediate portion and a guide portion, the intermediate portion coupling to the first and second arm segments and having an inverted conical geometry that is reduced from a base of the intermediate portion to at a coupling end of the intermediate portion, the coupling end coupling to the first and second arm segments, the base coupling to the guiding portion of the trunk segment. In some embodiments, the base portions of the first and second segments may have inverted conical geometries. Each of the base portions may extend between a junction end that couples to the corresponding inclined extension and a base end that couples to the trunk segment. In some embodiments, the light may be configured to propagate along a light propagation axis from the entrance end of the lap waveguide to the trunk segment, where the Y-junction may be symmetrical with respect to a plane that includes the axis of light propagation.
[0002] In some embodiments, the lap waveguide may have a width and include a tapered section, with the width of the lap waveguide narrowing along the tapered section as the guide becomes Overlapping waves extend from the input end to the signal waveguide. The overlay waveguide may optionally include a channel section in which at least a portion of the signal waveguide is arranged, the conical section being located between the input end and the channel section. The distal ends of the first and second arm segments may optionally be arranged in the conical section, in the channel section or at a boundary therebetween. The distal ends of the first and second arm segments may optionally be arranged at or immediately adjacent to a boundary between the channel section and the conical section. In some embodiments, the mode size converter also includes a substrate layer that supports the signal waveguide and the overlay waveguide. The substrate layer may include a mounting extension that extends beyond the entrance end of the overlay waveguide. In some embodiments, the mode size converter may be formed via at least one of a silicon on insulator (SOI) type process and a complementary metal oxide semiconductor (CMOS) type process.
[0003] BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic illustration of an optical device comprising a Mode Size Converter MSC, formed in accordance with one embodiment. Figure 2A is an enlarged view of the optical device showing the MSC in more detail. Figure 2B is a cross section of the optical device made along the line 2B-2B of Figure 2A. Fig. 3 is a plan view of a signal waveguide of the MSC formed in accordance with one embodiment. Fig. 4 is a plan view of a signal waveguide formed in accordance with one embodiment. FIG. 5 is an enlarged view of an optical device comprising an MSC which comprises the signal waveguide of FIG. 4. FIG. 6 is a cross section of an MSC formed in accordance with FIG. Embodiment. Fig. 7 is another cross-section of the MSC of Fig. 6 illustrating how the incoming light is progressively confined by a MSC signal waveguide. Fig. 8 is another cross-section of the MSC of Fig. 6 illustrating how the incoming light is substantially confined in the signal waveguide. Fig. 9 is a plan view of a signal waveguide formed in accordance with one embodiment.
[0004] DETAILED DESCRIPTION [0026] Fig. 1 is a schematic illustration of a portion of an optical device 100 comprising a mode size converter (MSC) 102 formed in accordance with one embodiment. The MSC 102 may also be referred to as a point size converter (SSC) and is configured to reduce (or expand) a propagated light modal profile. The modal profile can also be called a mode field profile. In Figure 1, the optical device 100 includes a single MSC 102, but may include multiple MSCs 102 in other embodiments. The optical device 100 is configured to receive light (or light signals), process or modulate the light in a predetermined manner, and then emit the processed or modulated light. In other embodiments, the optical device 100 receives and processes only the light. The optical device 100 may for example include an optical-electrical signal converter. In other embodiments, the optical device 100 processes and emits light only via the MSC 102. The optical device 100 may for example include an electrical-optical signal converter. In an alternative embodiment, the optical device 100 receives and emits the light without processing the light signals. The light may for example be in the form of optical data signals. In an exemplary embodiment, the optical device 100 is a photonic integrated circuit (PIC) used to communicate and / or process the optical signals. It should be understood, however, that the optical device 100 may be used in other applications. The optical device 100 may for example be a sensor comprising a sample that modulates the light signals and / or emits light signals based on properties of the sample. The optical device 100 may also be incorporated into a larger system or device. In some embodiments, the optical device 100 is an integrated device that includes a silicon photonic chip. At least a portion of the optical device 100 may be fabricated according to processes used to fabricate semiconductors. The optical device 100 may for example be manufactured in accordance with production processes of complementary metal oxide semiconductor (CMOS) devices and / or silicon on insulator (SOI) devices. More specifically, the optical device 100 may be manufactured by growth, deposition, etching, lithographic processing, or other modification of a plurality of stacked substrate layers. In particular embodiments, the optical device 100 is entirely manufactured using CMOS or SOI type processes. The optical device 100 and / or the MSC 102 comprises a plurality of substrate layers which are stacked on each other. For example, the substrate layers may include one or more layers of silicon oxide, one or more layers of silicon nitride, one or more layers of silicon, one or more buried oxide layers, one or more polymer layers, and / or one or more layers of silicon oxynitride (SiON). The various layers may have refractive indices for directing the light as described herein. The optical device 100 is configured to optically couple to an optical element 104. In the illustrated embodiment, the optical element 104 is an optical fiber (for example a monomode fiber (SMF)). The optical mode in the optical fiber may for example have a diameter of between about 9.2 microns and about 10.4 microns. In other embodiments, however, the optical element 104 may be another type of optical element capable of transmitting light. The optical element 104 may be for example a planar waveguide, a light source or a light detector. In some embodiments, the optical device 100 may operate bidirectionally so that light may be provided by the optical element 104 to the MSC 102, or alternatively by the MSC 102 to the optical element 104. Accordingly, although the following detailed description may use directional terms when detailing the propagation of light, it should be understood that in some embodiments, light may propagate in the opposite direction. Likewise, although terms such as "over", "overlay" or "elevation" may be used herein, it should be understood that the optical device 100 may have any orientation with respect to the direction of gravity. The MSC 102 may include an overlapping waveguide 106 and a signal waveguide 108 which is at least partially buried in or under the lap waveguide 106. The waveguide signal 108 may be referred to as a nanowire waveguide in some embodiments. MSC 102 may also include a coating body or layer 110 which is arranged over the overlapping waveguide 106. The overlapping waveguide 106 may be at least partially integrated or buried in the coating layer 110.
[0005] The MSC 102 is configured to receive light from the optical element 104 and reduce a modal profile of the incoming light to a modal profile that is sufficient for propagation through the signal waveguide 108. Alternatively, the MSC 102 may be configured to expand a modal outward light profile and provide outgoing light to the optical element 104. The signal waveguide 108 is communicatively coupled to an optical circuit 112. The optical circuit 112 is generally illustrated as a block in Fig. 1, since it should be understood that various optical circuits can be used. The optical circuit 112 may be configured to process light (or light signals) that propagates through the optical device 100 in a predetermined manner. Applications for optical device 100 or optical circuit 112 are for example, but not limited to, optical switches, couplers, routers, splitters, modulators, amplifiers, multiplexers / demultiplexers, length converters waveforms, and optical-electrical or electrical-optical signal converters. In other embodiments, the optical circuit 112 may be part of a sensor that is configured to detect one or more properties of an environment or a sample. In the illustrated embodiment, the optical device 100 also comprises a device substrate 114 comprising first and second substrate layers 116, 118. The signal waveguide 108, the recovery waveguide 106 and the coating layer 110 is stacked on the device substrate 114. As illustrated, the MSC 102 is a plane coupling structure that is configured to receive light that propagates in a direction parallel to a plane of the substrate of the substrate. 114. In an exemplary embodiment, the first and second substrate layers 116, 118 are formed to engage the optical element 104. The first substrate layer 116 denies, for example, a mounting extension 117 which extends beyond the second substrate layer 118. The mounting extension 117 includes a groove 120 which is sized and shaped in accordance with the optical element 104. The size and shape of the for example, the groove 120 may be configured to align the optical element 104 (e.g., an optical fiber) with the MSC 102 so that light propagating through the optical element 104 can be efficiently received by the optical device 100. [0033] FIG. 2A is an enlarged view of a portion of the optical device 100 comprising the MSC 102, and FIG. 2B is a cross section of the optical device 100 made along the line 2B-2B of FIG. 2A. . The coating layer 110 includes an inlet face or end 130 (Fig. 2A), and the overlapping waveguide 106 includes an inlet face or end 132 (Fig. 2A). The inlet ends 130, 132 may be planar or planar. At least one of the input ends 130, 132 is exposed outside of the optical device 100 and can receive light from the optical element 104 (FIG. 1). The optical element 104 may for example be positioned in such a way that the optical element 104 abuts against the input end 130 and / or the input end 132, or is positioned immediately adjacent to that -this. In one exemplary embodiment, the mounting extension 117 (FIG. 1) of the first substrate layer 116 extends beyond the input ends 130, 132. The light propagates through the end Input 132 of the overlapping waveguide 106. As described above, the optical device 100 and the MSC 102 may be formed from a plurality of substrate layers. The substrate layers may have different refractive indices. Each of the substrate layers may include a single layer or a plurality of sub-layers. The coating layer 110 may for example include a multitude of coating sub-layers. In one or more embodiments, the coating layer 110 may be made of a polymer or silicon oxynitride (SiON) having a refractive index of about 1.50, for example. The overlapping waveguide 106 may be made of a polymer or SiON and have a refractive index of about 1.50 to about 1.60, for example. A protective layer 107 may optionally extend between the overlapping waveguide 106 and the signal waveguide 108. The protective layer 107 may comprise, for example, silicon nitride and have a refractive index of about 2.00 for example. The signal waveguide 108 may be made of silicon and have a refractive index of about 3.50, for example. The second substrate layer 118 may consist of silicon oxide and have a refractive index of about 1.45, for example. The first substrate layer 116 may be made of silicon and have a refractive index of about 3.50, for example. In FIG. 2A, the overlapping waveguide 106 is configured to receive the light and allow it to propagate to the signal waveguide 108. The overlap waveguide 106 may optionally include a or several portions with different cross-sectional areas. As illustrated, the optical device 100 is oriented with respect to mutually perpendicular axes 191-193, comprising a longitudinal axis 191, a lateral axis 192, and an elevation axis 193. The overlapping waveguide 106 has a height 134 which is measured along the elevation axis 193 and a width 136 which is measured along the lateral axis 192. The light from the optical element 104 is configured to propagate through the input ends 132 in accordance with light propagation axis 198 (shown in FIG. 2B and FIG. 3) which is parallel to the longitudinal axis 191. In some embodiments, the light propagation axis 198 extends through a geometric center of the overlapping waveguide 106 so that the light propagation axis 198 is located above the signal waveguide 108. In some embodiments, the cross-sectional area of the guide waves overlap 106 can change size to convert the modal profile of the propagated light. The cross-sectional area of the overlapping waveguide 106 may, for example, decrease as the light propagates therethrough to reduce or decrease the modal profile of the light. In particular embodiments, the width 136 varies along different sections of the overlapping waveguide 106. As illustrated in FIG. 2A, the overlapping waveguide 106 has an input profile 151, a first cross section 152, a second cross section 153 and an exit profile 154, which may be referred to as a third cross section. In the illustrated embodiment, the height 134 is uniform from the input profile 151 to the output profile 154 (or third cross section). The output profile 154 may or may not be an end of the overlapping waveguide 106. More specifically, the overlapping waveguide 106 may continue beyond what is shown in FIG. The input waveform 151, the first and second cross sections 152, 153, and the output profile 154 illustrate a lap waveguide 106 having three different sections or portions. More specifically, the overlapping waveguide 106 may include a receiving section 140 that extends between the entry profile 151 and the first cross section 152, a conical section 142 that extends between the first and second sections. 140, 153, and a channel section 144 which extends between the second cross-section 153 and the exit profile 154. Figure 2B is a cross section of the channel section 144. Each of the first and second cross-sections 152 , 153 may be designated by a delimitation between adjacent sections. The second cross section 153 may for example be designated by the boundary 153 between the conical section 142 and the channel section 144. In an exemplary embodiment, the light propagation axis 198 generally extends through a center. The light propagation axis 198 may also extend generally through geometric centers of the conical section 142 and the channel section 144. [0038] Each of the sections of the receiving section 140, conical section 142 and channel section 144 has a cross-sectional area different transverse to the light propagation axis 198. The cross-sectional area of the receiving section 140 is uniform from the profile 151 to the first cross-section 152. However, the cross-sectional area of the conical section 142 decreases or decreases progressively As the conical section 142 extends from the first cross section 152 to the second cross section 153. The width 136 of the lap waveguide 106 is reduced particularly from the first cross section 152 to the second cross section 152. cross section 153. The reduction ratio can be configured to reduce the modal profile by a determined amount. In other embodiments, the height 134 may decrease (for example by using stacked layers of different dimensions) on the conical section 142. The cross-sectional area of the channel section 144 is uniform from the second section in other embodiments, the channel section 144 may also gradually decrease. As shown in FIGS. 2A and 2B, the signal waveguide 108 is integrated or buried in the second substrate layer 118. In other embodiments, however, the signal waveguide 108 may be positioned above the second substrate layer 118. The signal waveguide 108 may for example be positioned above the second substrate layer 118 and integrated in a protective layer and / or in the guide In the illustrated embodiment, however, the protective layer 107 extends between the overlapping waveguide 106 and the signal waveguide 108. The waveguide 108 has a refractive index greater than the refractive index of the second substrate layer 118 and the refractive index of the protective layer 107. As described above, the second substrate layer 118 may for example have a refractive index of 1.45, the protective layer may have a refractive index of about 2.00, and the signal waveguide 108 may have a second refractive index of about 3.50. As shown in FIG. 2A, the signal waveguide 108 comprises the first and second arm segments 160, 162 and a trunk segment 164. The trunk segment 164 may be a portion of the waveguide of FIG. signal 108 configured to satisfy a mode of propagation of light. The first and second arm segments 160, 162 and the trunk segment 164 may form a Y-junction 166. [0040] As described herein, the first and second arm segments 160, 162 of the signal waveguide 108 are configured to reduce a modal profile of light propagating from the input end 132 of the overlay waveguide 106 to the trunk segment 164. In some embodiments, the signal waveguide 108 is arranged in the conical section 142 and the channel section 144, but not in the receiving section 140. In other embodiments, the signal waveguide 108 is arranged only in the channel section 144. In alternative embodiments, the signal waveguide 108 may be arranged in the receiving section 140, the conical section 142 and the channel section 144. In some embodiments, the first and second arm segments 160, 162 are configured in function shapes of the different sections of the overlapping waveguide 106 to convert the modal profile of the light efficiently. FIG. 3 is a plan view of the signal waveguide 108 of the MSC 102 (FIG. 1). The trunk segment 164 includes an intermediate portion 170 and a guide portion 172. In the illustrated embodiment, the intermediate portion 170 and the guide portion 172 do not have a common or uniform cross-sectional shape. The intermediate portion 170 may for example have an inverted conical geometry. More specifically, the intermediate portion 170 includes a base 176 and a coupling end 178. The signal waveguide 108 has a waveguide width 180. As the signal waveguide 108 extends from the base 176 to the coupling end 178, the width of the waveguide 180 may decrease or its size be reduced. Alternatively, the width of the waveguide 180 increases as the signal waveguide 108 extends from the coupling end 178 to the base 176. [0042] In such embodiments , the width of the waveguide 180 can change according to a conicity rate. The taper ratio may be configured to effectively couple light into the trunk segment 164. The taper ratio may be based on one or more factors or parameters, such as the modal profile of the incoming light, the cross-sectional area of the overlapping waveguide 106 along the trunk segment 164, the dimensions of the first and second arm segments 160, 162, and / or the positions of the first and second arm segments 160, 162 relative to one another. 'other. The width of the waveguide 180 may be uniform or constant along the guide portion 172. The width of the waveguide 180 along the guide portion 172 is configured to satisfy a light propagation pattern. . In an exemplary embodiment, a height of the signal waveguide 108 is uniform over the entire trunk segment 164 and the first and second arm segments 160, 162. Each of the first and second arm segments 160, 162 has a distal tip or end 182 and a pair of opposed lateral edges 184, 186. Each of the first and second arm segments 160, 162 has a length 190 which is measured from the distal end 182 to the coupling end 178 of the trunk segment 164. As illustrated, the first and second arm segments 160, 162 form a V-shaped structure which couples the trunk segment 164 to form the Y-junction 166. More specifically, the edges side members 184 of the first and second arm segments 160, 162 are substantially opposed and are separated by a usable gap 196. The usable interval 196 decreases as the first and second arm segments 160 , 162 extend from the respective distal ends 182 to the coupling end 178 of the trunk segment 164. In the illustrated embodiment, the first and second arm segments 160, 162 are separated from each other when the first and second arm segments 160, 162 join the coupling end 178. The usable gap 196 as such exists along or on the coupling end 178 (denoted by 196 '). In alternative embodiments however, the first and second arm segments 160, 162 may join so that the side edges 184 form a V-shaped junction. The usable gap 196 may be reduced in accordance with an interval reduction rate. The gap reduction rate may be configured to effectively couple light into the trunk segment 164. The gap reduction rate may be based on one or more factors or parameters, such as the modal profile of the incoming light, the cross-sectional area of the overlapping waveguide 106 along the first and second arm segments 160, 162, and / or the dimensions of the first and second arm segments 160, 162. In an exemplary mode the lengths 190 of the first and second arm segments 160, 162 are identical. In one exemplary embodiment, the Y-junction 166 is symmetrical about a plane P1 which includes the light propagation axis 198, the plane P1 extending through a center of the trunk segment 164. The P1 plane and the light propagation axis 198 are both represented by a dotted line in Figure 3. The plane P1 may extend parallel to a plane formed by the elevation axis 192 (Figures 2A and 2B) and the longitudinal axis 191 (Figures 2A and 2B). In other embodiments however, the Y-junction 166 may not be symmetrical with respect to the plane P1. As described herein, the first and second arm segments 160, 162 are configured to reduce a modal profile of the light propagating from the input end 132 (FIG. 2) of the overlapping waveguide. 106 (Figure 1) to the trunk segment 164. Each of the first and second arm segments 160, 162 is for example configured to progressively receive more light energy when the light propagates towards the trunk segment 164. The energy in each of the first and second arm segments can then merge into the trunk segment 164 near the coupling end 178. In the illustrated embodiment, the edges of the pair of side edges 184, 186 s each extends parallel to each other between the corresponding distal end 182 and the trunk segment 164. The side edges 184, 186 may for example define between them an arm width 188. The arm width 188 may be United between the corresponding distal end 182 and the trunk segment 164. As formulated here, the edges of the pair of side edges may extend "parallel to each other between the corresponding distal end and the segment if the side edges extend parallel to each other by at least 50% of the length 190. In the illustrated embodiment, the side edges 184, 186 extend parallel to each other from the corresponding distal end 182 until to the trunk segment 164 along the entire length 190 of the corresponding arm segment. In other embodiments, however, the side edges 184, 186 are not parallel throughout the length. In some embodiments, for example, the side edges 184, 186 may extend parallel to one another at least 60% of the length 190 or at least 70% of the length 190. In more specific embodiment, the side edges 184, 186 may extend parallel to each other over at least 80% of the length 190, at least 90% of the length 190, or at least 95% of the length 190, length 190. Similarly, arm width 188 may be uniform over at least 50%, 60%, 70%, 80%, 85%, 90% or 95% of length 190. In the illustrated embodiment, first and second arm segments 160, 162 are linear from the trunk segment 164 to the distal end 182. In other embodiments, however, the first and second arm segments 160, 162 have not been linear since the trunk segment 164 to the distal end 182. The first and second arm segments 160, 162 may be For example, include sub-segments that have different angles with respect to the plane P1, such as the sub-segments 10 shown in FIG. 9. In some embodiments, the distal ends 182 of the first and second segments of FIG. arms 160, 162 are positioned in the conical section 142 (FIG. 2) or in the channel section 144 (FIG. 2) of the overlapping waveguide 106 (FIG. 1). In some embodiments, the distal ends 182 are positioned at or near the delineation 153 (Fig. 2) between the conical section 142 and the channel section 144. The distal ends 182 may be immediately adjacent delineation 153 if the distal ends are, for example, no more than about 20 micrometers from delimitation 153 as measured along the light propagation axis. In some embodiments, the distal ends 182 are positioned in the conical section 142 and the first and second arm segments 160, 162 extend from the conical section 142 into the channel section 144. The distal ends 182 may Also in other embodiments, the distal ends 182 of the first and second arm segments 160, 162 may be positioned in the receiving section 140 (FIG. 2) and the first and second arm segments 160, 162 can extend through the conical section 142 to the section Figure 4 is a plan view of a signal waveguide 202 of an MSC 204 (shown in Figure 5) formed in accordance with one embodiment. The signal waveguide 202 may include elements similar to the signal waveguide 108 (Fig. 2). In some embodiments, the signal waveguide 202 may replace the signal waveguide 108 in the MSC 102 (Fig. 1). The signal waveguide 202 includes first and second arm segments 212, 214 and a trunk segment 216. With respect to the trunk segment 216, the trunk segment 216 includes an intermediate portion 220 and a guide portion 222 As on the trunk segment 164 (Fig. 2), the intermediate portion 220 and the guide portion 222 do not have the same shape in cross-section. The intermediate portion 220 has an inverted conical geometry. More specifically, the intermediate portion 220 comprises a base 224 and a coupling end 226.
[0006] The trunk segment 216 has a waveguide width 228. As the signal waveguide 202 extends from the base 224 to the coupling end 226, the width of the waveguide 226 is increased. 228 waves may decrease. Alternatively, the width of the waveguide 228 increases as the signal waveguide 202 extends from the coupling end 226 to the base 224. [0050] In such embodiments the width of the waveguide 228 along the intermediate portion 220 may change according to a taper ratio. The taper ratio may be configured to effectively couple light into the trunk segment 216. The taper ratio may be based on one or more factors or parameters, such as the modal profile of the incoming light, a cross-sectional area of the overlapping waveguide 262 (illustrated in FIG. 5) at the trunk segment 216, the dimensions of the first and second arm segments 212, 214, and / or the positions of the first and second arm segments 212, 214; one compared to the other. The width of the waveguide 228 may be uniform along the guide portion 222. The width of the waveguide 228 along the guide portion 222 is configured to satisfy a light propagation mode. Each of the first and second arm segments 212, 214 includes a distal tip or end 230 and a pair of opposed lateral edges 232, 234. As illustrated, the first and second arm segments 212, 214 form a shaped structure. of V which couples the trunk segment 216 to form a Y-junction 236. More specifically, the side edges 232 of the first and second arm segments 212, 214 are substantially facing and are separated by a usable gap 242. The gap 242 decreases as the first and second arm segments 212, 214 extend from the respective distal ends 230 to the coupling end 226 of the trunk segment 216. In the illustrated embodiment, the first and second arm segments 212, 214 extend from the respective distal ends 230 to the coupling end 226 of the trunk segment 216. and second arm segments 212, 214 are separated from each other by the usable gap 242 when the first and second arm segments 212, 214 join the coupling end 226. The The time interval 242 can be used as such exists along or on the coupling end 226 (referred to as 242 '). In alternative embodiments however, the first and second arm segments 212, 214 may join so that the side edges 232 form a V-shaped junction. In one exemplary embodiment, each of first and second arm segments 212, 214 comprise an inclined extension 244 and a base portion 246 coupled to the corresponding inclined extension 244. As illustrated, the inclined extensions 244 of the first and second arm segments 212, 214 constitute a V-shape with a usable gap 242 between them which changes size. The base portions 246 of the first and second segments 212, 214 extend substantially parallel with a usable gap 242 therebetween. More specifically, the side edges 232 along the base portions 246 of the first and second arm segments 212, 214 extend parallel to each other such that the usable gap 242 'between the base portions 246 does not vary. Like the usable interval 196 (FIG. 3), the usable interval 242 may decrease according to a rate of interval reduction. The gap reduction rate may be configured to effectively couple the light into the trunk segment 216. The gap reduction rate may be based on one or more factors or parameters, such as the modal profile of the incoming light, the cross-sectional area of the overlapping waveguide 262 along the first and second arm segments 212, 214, and / or the dimensions of the first and second arm segments 214, 214. [0054] In the embodiment illustrated, the base portions 246 have inverted conical geometry. The base portions 246 include, for example, a junction end 250 and a base end 252, as well as a waveguide width 254. Since the base portions 246 extend from the corresponding junction end 250 to the corresponding base end 252, the width of the waveguide 254 increases in size. More specifically, although the side edges 232 along the base portions 246 extend parallel to each other, the side edges 234 along the base portions 246 do not extend parallel to each other. Instead, the side edges 234 form an angle therebetween while the base portions 246 extend from the corresponding junction end 250 to the corresponding base end 252, thereby increasing the width of the guide bar. The base portions 246 may thus have a trapezoidal shape. The waveguide widths 254 may increase at a rate configured to facilitate the coupling of light energy into the base portion 246 and trunk segment 216. [0055] As shown in Fig. 4, the side edges 234 along the base portions 246 may form a combined width 255. The combined width 255 adjacent the coupling end 226 of the trunk segment 216 is greater than the width of the waveguide 228 at the coupling end 226. The combined width 255 may for example be twice (2x) the width of the waveguide 228 at the coupling end 226. Portions of the base ends 252 do not engage with the coupling segment 226, so that the base portions 246 overlap only partially the coupling end 226. At most 30% of the cross sectional area that is adjacent the coupling end 226 may for example be superimposed on the the extrem Each edge of the pair of side edges 232, 234 may extend parallel to each other between the corresponding distal end 230 and the corresponding junction end 226 for each of the base portions 246. 250. The side edges 232, 234 may for example define between them an arm width 256. The arm width 256 may be uniform between the corresponding distal end 230 and the corresponding junction end 250. The inclined extensions 244 have respective lengths 258. In the illustrated embodiment, the side edges 232, 234 extend parallel to each other along the entire length 258 of the corresponding inclined extension 244. In other embodiments, the side edges 232, 234 are not parallel over the entire length 258. The side edges 232, 234 may for example extend parallel to each other by at least 50%, 60%, 70%, 80%, 85%, 90% or 95%. % of the length 258. [0057] In an exemplary embodiment, the lengths 258 of the inclined extensions 244 of the first and second arm segments 212, 214 are identical. In other embodiments however, the lengths 258 of the inclined extensions 244 may be different. In one exemplary embodiment, the Y-junction 236 is symmetrical with respect to a plane P2 which includes a light propagation axis 260, the plane P2 extending through a center of the trunk segment 216. The plane P2 and the light propagation axis 260 are both represented by a dashed line in FIG. 4. In other embodiments, however, the Y-junction 236 may not be symmetrical with respect to the plane P2. In some embodiments, the different portions of the signal waveguide 202 may be fabricated using at least one of a silicon on insulator (SOI) process and an oxide semiconductor process. complementary metal (CMOS). In particular, the dimensions of the trunk segment 216, the base portions 246 and the inclined extensions 244 can make the manufacture of the signal waveguide 202 less complex than other proposed mode conversion structures. FIG. 5 is an enlarged view of an optical device 200 comprising the MSC 204 which comprises the signal waveguide 202. The optical device 200 may comprise elements similar to those of the optical device 100 (FIG. 1). and may be formed of a plurality of substrate layers. The optical device 200 includes, for example, an overlay waveguide 262 in which the signal waveguide 202 is integrated. The MSC 204 may also include a coating body or layer 264 which is arranged over the covering waveguide 262. The covering waveguide 262 may be embedded or buried in the coating layer 264. The MSC 204 is configured to receive light from an optical element (not shown), such as an optical fiber, along a light propagation axis 265, and to convert a modal profile of incoming light into a modal profile sufficient for propagation through the signal waveguide 202. Alternatively, the MSC 204 may be configured to convert a modal profile of the outgoing light into a modal profile sufficient for propagation through the optical element . Although not shown, the signal waveguide 202 may be coupled in communication with an optical circuit, such as the optical circuit 112 (Fig. 1). The covering layer 264 comprises an inlet face or end 266, and the covering waveguide 262 comprises an inlet face or end 268. The inlet ends 266, 268 may be planar surfaces . At least one of the input ends 266, 268 is exposed outside the optical device 200 and can receive light from the optical element. The optical element may for example be positioned in such a way that the optical element abuts against the input end 266 and / or the input end 268, or is placed immediately adjacent thereto. . The light propagates through the input end 268 of the overlapping waveguide 262 and propagates in the signal waveguide 202. [0061] As in the case of the overlapping waveguide 106 (FIG. 1), the cross-sectional area of the overlapping waveguide 262 may change in size to convert the modal profile of the light. The overlapping waveguide 262 may for example have a width 270 which varies along different sections of the overlapping waveguide 262. In FIG. 5, the overlapping waveguide 262 has an input profile 271, a first cross section 272, a second cross section 273 and an outlet profile 274, which may also be referred to as a third cross section. The output profile 274 may or may not constitute an end of the overlapping waveguide 262. The input profile 271, the first and second transverse sections 272, 273 and the output profile 274 illustrate the guide. covering waves 262 having three different sections. More specifically, the overlapping waveguide 262 may include a receiving section 276 that extends between the entrance profile 271 and the first cross section 272, a conical section 278 that extends between the first and second sections. transverse 272, 273, and a channel section 280 extending between the second cross-section 273 and the output profile 274. In an exemplary embodiment, the light propagation axis 265 generally extends through a geometric center of the receiving section 276. The light propagation axis 265 can also extend generally through geometric centers of the conical section 278 and the channel section 280. [0063] 276, the conical section 278 and the channel section 280 may be respectively similar or identical to the receiving section 140, the conical section 142 and the channel section 144 shown. in Figure 2 and 10 described with respect thereto. In an exemplary embodiment, the distal ends 230 of the first and second arm segments 212, 214 may be positioned within the taper section 278. In other embodiments, the distal ends 230 may be positioned within the 276, in the channel section 280, or immediately adjacent a delimitation between adjacent sections. More specifically, distal ends 230 may be positioned at or immediately adjacent to first cross section 272 or second cross section 273. [0064] The input profile 271 of the overlapping waveguide 262 is sized and shaped according to the incoming light so that the modal profile of the incoming light can be reduced as described herein. When the MSC 204 and the optical element are functionally positioned relative to each other, the incoming light is received at an input point 282 along the input profile 271. The entry point 282 may be centered along the light propagation axis 265. In some embodiments, the MSC 204 may provide greater tolerances for aligning the MSC 204 relative to the optical element. More specifically, the MSC 204 may allow tilt of the incoming light with respect to the light propagation axis 265 and / or allow the incoming light to enter the input profile 271 at a position offset from the entry point 282. The incoming light may, for example, be shifted vertically ± 2.4 micrometers and have a loss of only 2 dB. The incoming light can be shifted horizontally ± 2.7 micrometers and have a loss of only 2 dB.
[0007] The coupling efficiency can be greater than 60% with a vertical or horizontal offset of ± 2.5 micrometers. The MSC 204 can operate in TE mode, TM mode, or TE and TM modes, with a broadband operational window. Figures 6 to 8 illustrate different cross-sections of an MSC 300 formed in accordance with one embodiment, and demonstrate the conversion of a propagated light modal profile 310. The MSC 300 may be similar or identical to the MSC 102 (Figure 1) and MSC 204 (Figure 5). The MSC 300 includes, for example, an overlay waveguide 302 having a first refractive index, and a signal waveguide 304 which is integrated in the overlay waveguide 302 and has a second refractive index. The signal waveguide 304 includes first and second arm segments 306, 308 that join a trunk segment (not shown). The first and second arm segments 306, 308 may form a Y-junction, such as the Y junctions 166 (FIG. 2) and 236 (FIG. 4). In FIGS. 6 to 8, the overlapping waveguide 302 has a common profile such that the overlapping waveguide 302 does not change in size. This portion of the overlapping waveguide 302 may represent a channel section of the overlay waveguide 302, such as the channel section 144 (FIG. 2) and the channel section 280 (FIG. 5). FIG. 6 illustrates a cross section of the MSC 300 close to the distal ends 312, 314 of the first and second arm segments 306, 308. The distal ends 312, 314 may be positioned at a delimitation between the channel section of the guide covering wave 302 and a conical section (not shown). In such embodiments, the conical section may reduce the modal profile of the incoming light 310 of a modal profile determined by the optical element (eg an optical fiber) to a modal profile similar to the modal profile shown in FIG. 6. As shown in FIG. 6, portions of the propagated light 310 have been confined in the first and second arm segments 306, 308. The first and second arm segments 306, 308 are separated by a usable interval 316. [ The refractive index and the cross-sectional area of the overlapping waveguide 302 and the refractive indexes, the cross-sectional areas, and the positions of the first and second arm segments 306, 308 can be configured one at a time. relative to others so as to provide an effective refractive index of the MSC 300 which progressively confines light in the first and second arm segments 306, 308. As illustrated by comparing FIGS. 6 to 8, the usable gap 316 is reduced when the first and second arm segments 306, 308 extend towards the trunk segment. When the light 310 propagates along the overlapping waveguide 302, the effective refractive index of the MSC 300 causes the propagated light 310 to be progressively confined by the first and second arm segments 306, 308. 10 propagated light 310 is for example more confined in the first and second arm segments 306, 308 in Figure 7 than in Figure 6, and the propagated light 310 is more confined in the first and second arm segments 306, 308 in Figure 8 In Figure 8, in Figure 8, the portions of the first and second arm segments 306, 308 may be base portions, such as the base portions 246 (Figure 4). Fig. 9 is a plan view of a signal waveguide 402 formed in accordance with one embodiment. The signal waveguide 402 may be used with an MSC, such as MSC 102 (FIG. 1) or MSC 204 (FIG. 4). The signal waveguide 402 may include elements similar to the signal waveguide 108 (Fig. 2) and / or the signal waveguide 202 (Fig. 4). In some embodiments, the signal waveguide 402 may replace the signal waveguide 108 in the MSC 102 (Fig. 1) or the signal waveguide 202 in the MSC 204 (Fig. 5). The signal waveguide 402 includes first and second arm segments 412, 414 and a trunk segment 416. In the illustrated embodiment, the trunk segment 416 is identical to the trunk segment 216. trunk 416 may however have a different configuration in other embodiments. Each of the first and second arm segments 412, 414 has a tip or distal end 430 and a pair of opposite side edges 432, 434.
[0008] As illustrated, the first and second arm segments 412, 414 form a V-shaped or Y-shaped structure which couples the trunk segment 416 to form a Y-junction 436. As illustrated, the V-shaped structure FIG. 9 is different from the V-shaped structure of FIG. 4. The lateral edges 432 of the first and second arm segments 412, 414 are substantially facing each other and are separated by a usable gap 442. The usable interval 442 decreases as the first and second arm segments 412, 414 extend from the respective distal ends 430 to the coupling end 426 of the trunk segment 416. In the illustrated embodiment, the first and second arm segments 412, 414 extend from the respective distal ends 430 to the coupling end 426. arm segments 412, 414 are separated from each other by the usable gap 442 when the first and second arm segments 412, 414 join the coupling end 426. The usable gap 442 as such exists the along coupling end 426 (designated 442 ') or thereto. In alternative embodiments however, the first and second arm segments 412, 414 may join so that the side edges 432 form a V-shaped junction. In an exemplary embodiment, each of first and second arm segments 412, 414 include an inclined extension 444 and a base portion 446 coupled to the corresponding inclined extension 444. The Y-junction 436 is symmetrical with respect to a plane P3 which comprises a light propagation axis 498, the plane P3 extending through a center of the trunk segment 416. The plane P3 and the axis of propagation of light 498 are both represented by a dashed line in Figure 9. In some embodiments, the inclined extensions are non-linear. Each of the inclined extensions 444 includes, for example, a first sub-segment 491 and a second sub-segment 492. The first sub-segment 491 extends from one end of the corresponding base portion 446 to the second sub-segment 492. second sub-segment 492 extends from the first sub-segment 491 to the distal end 430. Each sub-segment of the first and second sub-segments 491, 492 may form a different angle relative to the plane P3. As illustrated, the first and second sub-segments 491, 492 respectively form first and second angles O1, O2. The first angle O1 is smaller than the second angle O2. In alternative embodiments, the first angle O1 may be greater than the second angle O1. second angle 02. Although FIG. 4 only illustrates two linear sub-segments, it is contemplated that other embodiments may include more than two linear sub-segments. In alternative embodiments, one or more of the sub-segments may be non-linear but have a curved shape. The base portions 446 of the first and second segments 412, 414 extend substantially parallel with a usable gap 442 'therebetween. More specifically, the side edges 432 along the base portions 446 of the first and second arm segments 412, 414 extend parallel to each other such that the usable gap 442 'between the base portions 446 does not vary. The usable interval 442 between the inclined extensions 444 can be reduced according to a first interval reduction ratio between the first sub-segments 491 and a second interval reduction ratio between the second sub-segments 492. The first and second gap reduction rates and the first and second angles 01, 02 can be configured to efficiently couple light into the trunk segment 416. The first and second gap reduction rates and the first and second angles 01, 02 may be based on one or more factors or parameters, such as the modal profile of the incoming light, the cross-sectional area of the overlapping waveguide 462 along the first and second arm segments 412 , 414, and / or the dimensions of the first and second arm segments 414, 414. In the illustrated embodiment, the base portions 446 have an inverted conical geometry It is to be understood that the foregoing description is for illustrative purposes and not restrictive. The embodiments described above (and / or aspects thereof) can for example be used by combining them. Many modifications may further be made to adapt a particular situation or material to the requirements of the invention without departing from its scope. The dimensions, the types of materials, the orientations of the various components, as well as the number and position of the various components as described herein are intended to define the parameters of certain embodiments and are in no way limiting, serving only examples of embodiments. As used in the description, the phrase "in an exemplary embodiment" and other similar sentences mean that the described embodiment is only an example. The sentence is not intended to limit the inventive content of this embodiment. Other embodiments of the inventive content may not include the feature or structure described.
权利要求:
Claims (20)
[0001]
REVENDICATIONS1. A mode size converter (102) comprising: an overlay waveguide (106) having an input end (130) configured to receive light from an optical element (104), the waveguide covering member (106) having a first refractive index; and a signal waveguide (108) integrated in the overlap waveguide (106) and having a second refractive index that is greater than the first refractive index, the signal waveguide (108) comprising first and second arm segments (160,162) and a trunk segment (164) forming a Y-junction (166), the first and second arm segments (160,162) being configured to reduce a modal profile light propagating from the input end (130) of the overlapping waveguide (106) to the trunk segment (164), each of the first and second arm segments (160, 162) including a distal end (182) and a pair of opposite side edges (184, 186), wherein the edges of the pair of side edges (184, 186) extend parallel to each other between the distal end corresponding (182) and the trunk segment (164).
[0002]
The mode size converter (102) according to claim 1, wherein each of the first and second arm segments (160, 162) comprises an inclined extension (244) and a base portion (246) which is coupled to the inclined extension (244), the inclined extensions (244) of the first and second arm segments (160, 162) forming a V-shaped pattern, the base portions (246) of the first and second arm segments (160); , 162) extending substantially parallel with a usable gap (242) therebetween. 25
[0003]
The mode size converter (102) according to claim 1, wherein the trunk segment (164) comprises an intermediate portion (170) and a guide portion (172), the intermediate portion (170) coupling with the first and second arm segments (160,162) having an inverted cone geometry which is reduced from a base (176) of the intermediate portion (170) to a coupling end (178) of the intermediate portion (170) the coupling end (178) coupling to the first and second arm segments (160, 162), the base (176) coupling to the guide portion (172) of the trunk segment (164).
[0004]
The mode size converter (102) according to claim 1, wherein the light is configured to propagate along a light propagation axis (198) from the input end (130) of the light guide. covering waves (106) to the trunk segment (164), the Y-junction (166) being symmetrical with respect to a plane which includes the light propagation axis (198).
[0005]
The mode size converter (102) according to claim 1, wherein the overlapping waveguide (106) has a width and comprises a conical section (142), the width of the overlapping waveguide (106). ) decreasing along the conical section (142) as the overlapping waveguide (106) extends from the input end (130) to the signal waveguide ( 108).
[0006]
The mode size converter (102) according to claim 5, wherein the overlapping waveguide (106) comprises a channel section (144) in which at least a portion of the signal waveguide is arranged (108), the conical section (142) being located between the inlet end (130) and the channel section (144).
[0007]
The mode size converter (102) according to claim 6, wherein the distal ends (182) of the first and second arm segments (160,162) are arranged in the conical section (142) in the channel section (144), or a delimitation between them.
[0008]
The mode size converter (102) according to claim 6, wherein the distal ends (182) of the first and second arm segments (160, 162) are arranged at a boundary between the channel section (144) and the conic section (142), or immediately near this delimitation.
[0009]
The mode size converter (102) according to claim 1, wherein the mode size converter (102) is formed via at least one of a silicon-on-insulator (SOI) type process and a semi-type process. Complementary metal oxide conductor (CMOS). 31
[0010]
A mode size converter (102) comprising: an overlay waveguide (106) having an input end (130) configured to receive light from an optical element (104), the light guide (102) covering waves (106) having a first refractive index; A signal waveguide (108) integrated in the overlap waveguide (106) and having a second refractive index which is greater than the first refractive index, the signal waveguide (108) comprising first and second arm segments (160,162) and a trunk segment (164) forming a Y-junction (166), the first and second arm segments (160,162) being configured to reduce a modal profile light propagating from the input end (130) of the overlapping waveguide (106) to the trunk segment (164), wherein each of the first and second arm segments (160, 162) comprises an inclined extension (244) and a base portion (246) which is coupled to the inclined extension (244), the inclined extensions (244) of the first and second arm segments (160, 162) forming a pattern. V-shape, the base portions (246) of the first and second arm segments (160, 162) extending from essentially parallel with a usable interval (196) between them.
[0011]
The mode size converter (102) according to claim 10, wherein each of the first and second arm segments (160, 162) has a distal end (182) and a pair of opposite side edges (184, 186). wherein the edges of the pair of side edges (184, 186) extend parallel to each other between the corresponding distal end (182) and the trunk segment (164).
[0012]
The mode size converter (102) according to claim 10, wherein the trunk segment (164) comprises an intermediate portion (170) and a guide portion (172), the intermediate portion (170) coupling to the first and second arm segments (160,162) having an inverted conical geometry which is reduced from a base (176) of the intermediate portion (170) to a coupling end (178) of the intermediate portion (170) the coupling end (178) coupling to the first and second arm segments (160, 162), the base (176) coupling to the guide portion (172) of the trunk segment (164).
[0013]
The mode size converter (102) according to claim 10, wherein the base portions (246) of the first and second arm segments (160, 162) have inverted conical geometries, each of the base portions (246). extending between a junction end (250) which couples to the corresponding inclined extension (244) and a base end (252) which couples to the trunk segment (164).
[0014]
The mode size converter (102) according to claim 10, wherein the light is configured to propagate along a light propagation axis (198) from the input end (130) of the light guide. overlap waves (106) to the trunk segment (164), the Y-junction (166) being symmetrical about a plane that includes the light propagation axis (198).
[0015]
The mode size converter (102) according to claim 10, wherein the lap waveguide (106) has a width and comprises a conical section (142), the width of the lap waveguide (106). ) decreasing along the conical section (142) as the overlapping waveguide (106) extends from the input end (130) to the signal waveguide (108).
[0016]
The mode size converter (102) according to claim 15, wherein the overlapping waveguide (106) comprises a channel section (144) in which at least a portion of the waveguide portion is arranged. signal (108), the conical section (142) being located between the input end (130) and the channel section (144).
[0017]
The mode size converter (102) according to claim 16, wherein the distal ends (182) of the first and second arm segments (160, 162) are arranged in the conical section (142), in the channel (144), or a delimitation therebetween.
[0018]
The mode size converter (102) of claim 16, wherein the distal ends (182) of the first and second arm segments (160, 162) are arranged at a boundary between the channel section (144) and the conical section (142), or immediately adjacent to this delimitation.
[0019]
The mode size converter (102) according to claim 10, further comprising a substrate layer (116) which supports the signal waveguide (108) and the overlap waveguide (106), the a substrate layer (116) having a mounting extension (117) extending beyond the input end (130) of the overlay waveguide (106).
[0020]
The mode size converter (102) according to claim 10, wherein the mode size converter (102) is formed via at least one of a silicon on insulator (SOI) type process and a semiconductor type process. Complementary metal oxide (CMOS). 10
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法律状态:
2016-11-23| PLFP| Fee payment|Year of fee payment: 2 |
2018-08-31| ST| Notification of lapse|Effective date: 20180731 |
2018-09-07| CD| Change of name or company name|Owner name: TE CONNECTIVITY CORPORATION, US Effective date: 20180808 |
优先权:
申请号 | 申请日 | 专利标题
US14/537,580|US9348092B1|2014-11-10|2014-11-10|Mode size converters for reducing a modal profile of incoming light|
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